Publication:

Novel Low Thermal Budget CMOS RMG: Performance and Reliability Benchmark Against Conventional High Thermal Budget Gate Stack Solutions

Date

2023
Journal article
https://doi.org/10.1109/TED.2023.3314001
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dc.contributor.authorFranco, Jacopo
dc.contributor.authorArimura, Hiroaki
dc.contributor.authorde Marneffe, Jean-Francois
dc.contributor.authorBrus, Stephan
dc.contributor.authorRitzenthaler, Romain
dc.contributor.authorCroes, Kristof
dc.contributor.authorKaczer, Ben
dc.contributor.authorHoriguchi, Naoto
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.imecauthorFranco, Jacopo
dc.contributor.imecauthorArimura, Hiroaki
dc.contributor.imecauthorde Marneffe, Jean-Francois
dc.contributor.imecauthorBrus, Stephan
dc.contributor.imecauthorRitzenthaler, Romain
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorKaczer, Ben
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.contributor.orcidimecFranco, Jacopo::0000-0002-7382-8605
dc.contributor.orcidimecArimura, Hiroaki::0000-0002-3138-708X
dc.contributor.orcidimecde Marneffe, Jean-Francois::0000-0001-5178-6670
dc.contributor.orcidimecBrus, Stephan::0000-0003-3554-0640
dc.contributor.orcidimecRitzenthaler, Romain::0000-0002-8615-3272
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.date.accessioned2023-12-15T08:41:03Z
dc.date.available2023-10-17T17:31:59Z
dc.date.available2023-12-15T08:41:03Z
dc.date.embargo2023-09-23
dc.date.issued2023
dc.identifier.doi10.1109/TED.2023.3314001
dc.identifier.issn0018-9383
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/42793
dc.publisherIEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
dc.source.beginpage6658
dc.source.endpage6664
dc.source.issue12
dc.source.journalIEEE TRANSACTIONS ON ELECTRON DEVICES
dc.source.numberofpages7
dc.source.volume70
dc.title

Novel Low Thermal Budget CMOS RMG: Performance and Reliability Benchmark Against Conventional High Thermal Budget Gate Stack Solutions

dc.typeJournal article
dspace.entity.typePublication
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