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Novel Low Thermal Budget CMOS RMG: Performance and Reliability Benchmark Against Conventional High Thermal Budget Gate Stack Solutions
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Authors
Franco, Jacopo
;
Arimura, Hiroaki
;
de Marneffe, Jean-Francois
;
Brus, Stephan
;
Ritzenthaler, Romain
;
Croes, Kristof
;
Kaczer, Ben
;
Horiguchi, Naoto
DOI
10.1109/TED.2023.3314001
ISSN
0018-9383
Issue
12
Journal
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume
70
Title
Novel Low Thermal Budget CMOS RMG: Performance and Reliability Benchmark Against Conventional High Thermal Budget Gate Stack Solutions
Publication type
Journal article
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2
20.500.12860/42793.2
*
2023-12-15T08:37:44Z
validation by library/open access desk
1
20.500.12860/42793
2023-10-17T17:31:59Z
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