dc.contributor.author | De Witte, Hilde | |
dc.contributor.author | Conard, Thierry | |
dc.contributor.author | Sporken, R. | |
dc.contributor.author | Gouttebaron, R. | |
dc.contributor.author | Magnée, R. | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.contributor.author | Caudano, R. | |
dc.contributor.author | Gijbels, Renaat | |
dc.date.accessioned | 2021-10-14T12:50:24Z | |
dc.date.available | 2021-10-14T12:50:24Z | |
dc.date.issued | 2000 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/4285 | |
dc.source | IIOimport | |
dc.title | XPS study of ion induced oxidation of silicon with and without oxygen flooding | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Conard, Thierry | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.contributor.orcidimec | Conard, Thierry::0000-0002-4298-5851 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 73 | |
dc.source.endpage | 76 | |
dc.source.conference | Secondary Ion Mass Spectrometry - SIMS XII. Proceedings of the 12th International Conference | |
dc.source.conferencedate | 5/09/1999 | |
dc.source.conferencelocation | Brussel Belgium | |
imec.availability | Published - open access | |