SIMS analysis of oxynitrides: evidence for nitrogen diffusion induced by oxygen flooding

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Authors

De Witte, Hilde; Conard, Thierry; Vandervorst, Wilfried; Gijbels, Renaat

Issue

11

Journal

Surface and Interface Analysis

Volume

29

Title

SIMS analysis of oxynitrides: evidence for nitrogen diffusion induced by oxygen flooding

Publication type

Journal article

Embargo date

9999-12-31

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