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Study of oxynitrides with dual beam TOF-SIMS

dc.contributor.authorDe Witte, Hilde
dc.contributor.authorConard, Thierry
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorGijbels, Renaat
dc.date.accessioned2021-10-14T12:50:37Z
dc.date.available2021-10-14T12:50:37Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4288
dc.sourceIIOimport
dc.titleStudy of oxynitrides with dual beam TOF-SIMS
dc.typeProceedings paper
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage611
dc.source.endpage614
dc.source.conferenceSecondary Ion Mass Spectrometry - SIMS XII. Proceedings of the 12th International Conference
dc.source.conferencedate5/09/1999
dc.source.conferencelocationBrussel Belgium
imec.availabilityPublished - open access


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