Authors

De Witte, Hilde; De Gendt, Stefan; Douglas, M.; Conard, Thierry; Kenis, Karine; Mertens, Paul; Vandervorst, Wilfried; Gijbels, Renaat

Issue

5

Journal

Journal of the Electrochemical Society

Volume

147

Title

Evaluation of time-of-flight secondary ion mass spectrometry for metal contamination monitoring on Si wafer surfaces

Publication type

Journal article

Embargo date

9999-12-31