Publication:

Ultra-Fine Pitch RDL (UFPRDL) using Polymer Dual Damascene processing

Date

2023
Proceedings Paper
https://doi.org/10.1109/ECTC51909.2023.00233
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Author(s)

Pinho, Nelson  
;
Chery, Emmanuel  
;
Pantano, Nicolas  
;
Slabbekoorn, John  
;
Miller, Andy  
;
Beyne, Eric  

Journal

na

Abstract

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1118 since deposited on 2023-10-23
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1118 since deposited on 2023-10-23
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Acq. date: 2026-04-27

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