Publication:

Ultra-Fine Pitch RDL (UFPRDL) using Polymer Dual Damascene processing

Date

2023

Proceedings Paper

https://doi.org/10.1109/ectc51909.2023.00233

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Author(s)

;

Chery, Emmanuel

;

Pantano, Nicolas

;

Slabbekoorn, John

;

;

Journal

na

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1136 since deposited on 2023-10-23

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Acq. date: 2026-10-12