Modeling of ferroelectric micro-cantilever actuator

Abstract

This paper proposes a simple modeling and characterizing ferroelectric micro-cantilever beam. The key ingredient of the proposed method is the incorporation of phenomenological hysteresis model into the voltage-induced bending moment of the Euler-Bernoulli beam model. Furthermore, by combining the predicted hysteresis displacement with measurement data, ferroelectric parameters including remanent and saturated polarization, coercive electric field as well as piezoelectric coefficient e(31) can be determined simultaneously. The proposed model and characterization approach can be useful for micro-actuator design.