dc.contributor.author | Nguyen, Binh | |
dc.contributor.author | Czarnecki, Piotr | |
dc.contributor.author | Zunic, Maja | |
dc.contributor.author | Brondani Torri, Guilherme | |
dc.contributor.author | Rochus, Veronique | |
dc.date.accessioned | 2024-05-23T12:34:51Z | |
dc.date.available | 2023-11-27T17:27:09Z | |
dc.date.available | 2024-05-23T12:34:51Z | |
dc.date.issued | 2023 | |
dc.identifier.issn | 2836-8487 | |
dc.identifier.other | WOS:001090583800017 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/43190.2 | |
dc.source | WOS | |
dc.title | Modeling of ferroelectric micro-cantilever actuator | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Nguyen, Binh | |
dc.contributor.imecauthor | Czarnecki, Piotr | |
dc.contributor.imecauthor | Zunic, Maja | |
dc.contributor.imecauthor | Brondani Torri, Guilherme | |
dc.contributor.imecauthor | Rochus, Veronique | |
dc.contributor.orcidimec | Nguyen, Binh::0000-0003-0830-3121 | |
dc.contributor.orcidimec | Czarnecki, Piotr::0000-0002-3648-3046 | |
dc.contributor.orcidimec | Zunic, Maja::0000-0002-8350-1948 | |
dc.contributor.orcidimec | Brondani Torri, Guilherme::0000-0002-5450-658X | |
dc.contributor.orcidimec | Rochus, Veronique::0000-0001-9680-5724 | |
dc.identifier.doi | 10.1109/DTIP58682.2023.10267943 | |
dc.identifier.eisbn | 979-8-3503-4131-7 | |
dc.source.numberofpages | 6 | |
dc.source.peerreview | yes | |
dc.source.conference | Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) | |
dc.source.conferencedate | MAY 28-31, 2023 | |
dc.source.conferencelocation | Valetta | |
dc.source.journal | N/A | |
imec.availability | Published - imec | |
dc.description.wosFundingText | B.H. Nguyen acknowledges the funding from European Union's Horizon 2020 research and innovation programme under the Marie Sklodowska-Curie grant agreement No.101063162. | |