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Modeling of ferroelectric micro-cantilever actuator
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Authors
Nguyen, Binh
;
Czarnecki, Piotr
;
Zunic, Maja
;
Brondani Torri, Guilherme
;
Rochus, Veronique
DOI
10.1109/DTIP58682.2023.10267943
EISBN
979-8-3503-4131-7
ISSN
2836-8487
Conference
Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)
Journal
N/A
Title
Modeling of ferroelectric micro-cantilever actuator
Publication type
Proceedings paper
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2
20.500.12860/43190.2
*
2024-05-23T12:32:30Z
validation by library/open access desk
1
20.500.12860/43190
2023-11-27T17:27:09Z
*Selected version
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