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Optimizing extreme ultraviolet lithography imaging metrics as a function of absorber thickness and illumination source: a simulation case study of Ta-Co alloy
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Optimizing extreme ultraviolet lithography imaging metrics as a function of absorber thickness and illumination source: a simulation case study of Ta-Co alloy
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Date
2023
Journal article
https://doi.org/10.1117/1.JMM.22.3.033201
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Thakare, Devesh
;
Delabie, Annelies
;
Philipsen, Vicky
Journal
JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3
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873
since deposited on 2023-12-15
Acq. date: 2026-01-09
Citations
Metrics
Views
873
since deposited on 2023-12-15
Acq. date: 2026-01-09
Citations