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Optimizing extreme ultraviolet lithography imaging metrics as a function of absorber thickness and illumination source: a simulation case study of Ta-Co alloy

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878 since deposited on 2023-12-15
1last month
Acq. date: 2026-09-13

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878 since deposited on 2023-12-15
1last month
Acq. date: 2026-09-13

Citations