Controlling CoSi2 nucleation: the effect of entropy of mixing

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Authors
Detavernier, C.; Van Meirhaeghe, R. L.; Maex, Karen; Cardon, F.
Conference
MRS Spring Meeting Symposium: Gate stack and silicide issues in silicon processing; 2000;
Title
Controlling CoSi2 nucleation: the effect of entropy of mixing
Publication type
Oral presentation
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