dc.contributor.author | Fallica, Roberto | |
dc.contributor.author | Huang, Weizhong | |
dc.contributor.author | Suh, Hyo Seon | |
dc.contributor.author | De Simone, Danilo | |
dc.contributor.author | Guerrero, Douglas J. | |
dc.contributor.author | Kato, Kodai | |
dc.date.accessioned | 2024-02-05T13:57:34Z | |
dc.date.available | 2024-01-13T17:47:50Z | |
dc.date.available | 2024-02-05T13:57:34Z | |
dc.date.issued | 2023 | |
dc.identifier.isbn | 978-1-5106-6748-8 | |
dc.identifier.issn | 0277-786X | |
dc.identifier.other | WOS:001125089900017 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/43405.2 | |
dc.source | WOS | |
dc.title | Functional underlayers for dose reduction and collapse mitigation in EUV lithography: a factorial analysis | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Fallica, Roberto | |
dc.contributor.imecauthor | Huang, Weizhong | |
dc.contributor.imecauthor | Suh, Hyo Seon | |
dc.contributor.imecauthor | De Simone, Danilo | |
dc.contributor.orcidimec | Fallica, Roberto::0000-0003-4523-9624 | |
dc.contributor.orcidimec | Suh, Hyo Seon::0000-0003-4370-5062 | |
dc.contributor.orcidimec | De Simone, Danilo::0000-0003-3927-5207 | |
dc.date.embargo | 9999-12-31 | |
dc.identifier.doi | 10.1117/12.2687546 | |
dc.identifier.eisbn | 978-1-5106-6749-5 | |
dc.source.numberofpages | 4 | |
dc.source.peerreview | yes | |
dc.source.beginpage | Art. 27500I | |
dc.source.conference | International Conference on Extreme Ultraviolet Lithography | |
dc.source.conferencedate | OCT 02-05, 2023 | |
dc.source.conferencelocation | Monterey | |
dc.source.journal | Proceedings of SPIE | |
dc.source.volume | 12750 | |
imec.availability | Published - imec | |
dc.description.wosFundingText | We are indebted to Gian Lorusso (imec) for fruitful discussions, Nadia Vandenbroeck (imec) for experimental support, and internship students Saika Bari (KIT), Steven Chen (KIT), and Muhammad Safdar (MUAS) for experimental work, data collection and analysis. R.F. acknowledges the Flemish Research Foundation (FWO) for co-financing the dissemination activity at SPIE PUV 2023 via grant #K108523N. | |