EISBN
978-1-5106-6749-5
ISBN
978-1-5106-6748-8
ISSN
0277-786X
Conference
International Conference on Extreme Ultraviolet Lithography
Journal
Proceedings of SPIE
Volume
12750
Title
Functional underlayers for dose reduction and collapse mitigation in EUV lithography: a factorial analysis
Publication type
Proceedings paper
Embargo date
9999-12-31