Show simple item record

Stitching for High NA: zooming in on CDU budget

dc.contributor.authorDavydova, Natalia
dc.contributor.authorvan Look, Lieve
dc.contributor.authorWeldeslassie, Ataklti
dc.contributor.authorWiaux, Vincent
dc.contributor.authorHuddleston, Laura
dc.contributor.authorSlachter, Bram
dc.contributor.authorPellens, Nick
dc.contributor.authorTimmermans, Frank
dc.contributor.authorWittebrood, Friso
dc.contributor.authorvan Setten, Eelco
dc.contributor.authorWilson, Daniel
dc.date.accessioned2024-04-16T08:58:54Z
dc.date.available2024-01-13T17:47:51Z
dc.date.available2024-04-16T08:58:54Z
dc.date.issued2023
dc.identifier.isbn978-1-5106-6748-8
dc.identifier.issn0277-786X
dc.identifier.otherWOS:001125089900001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/43409.2
dc.sourceWOS
dc.titleStitching for High NA: zooming in on CDU budget
dc.typeProceedings paper
dc.contributor.imecauthorvan Look, Lieve
dc.contributor.imecauthorWeldeslassie, Ataklti
dc.contributor.imecauthorWiaux, Vincent
dc.contributor.imecauthorPellens, Nick
dc.contributor.orcidimecVan Look, Lieve::0009-0000-6198-024X
dc.contributor.orcidimecWiaux, Vincent::0000-0002-8923-5708
dc.contributor.orcidimecPellens, Nick::0000-0001-5527-5130
dc.identifier.doi10.1117/12.2687703
dc.identifier.eisbn978-1-5106-6749-5
dc.source.numberofpages14
dc.source.peerreviewyes
dc.source.beginpageArt. 1275002
dc.source.conferenceInternational Conference on Extreme Ultraviolet Lithography
dc.source.conferencedateOCT 02-05, 2023
dc.source.conferencelocationMonterey
dc.source.journalProceedings of SPIE
dc.source.volume12750
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record

Version history

VersionItemDateSummary
220.500.12860/43409.2*2024-04-16T08:57:30Zvalidation by library/open access desk
120.500.12860/434092024-01-13T17:47:51Z

*Selected version