Publication:

Stitching for High NA: zooming in on CDU budget

Date

2023

Proceedings Paper

https://doi.org/10.1117/12.2687703

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Author(s)

Davydova, Natalia

;

van Look, Lieve

;

Weldeslassie, Ataklti

;

;

Huddleston, Laura

;

;

;

Timmermans, Frank

;

Wittebrood, Friso

;

van Setten, Eelco

;

Journal

Proceedings of SPIE

Metrics

853 since deposited on 2024-01-13

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Acq. date: 2025-12-09