Publication:

Stitching for High NA: zooming in on CDU budget

Date

2023
Proceedings Paper
https://doi.org/10.1117/12.2687703
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dc.contributor.authorDavydova, Natalia
dc.contributor.authorvan Look, Lieve
dc.contributor.authorWeldeslassie, Ataklti
dc.contributor.authorWiaux, Vincent
dc.contributor.authorHuddleston, Laura
dc.contributor.authorSlachter, Bram
dc.contributor.authorPellens, Nick
dc.contributor.authorTimmermans, Frank
dc.contributor.authorWittebrood, Friso
dc.contributor.authorvan Setten, Eelco
dc.contributor.authorWilson, Daniel
dc.contributor.imecauthorvan Look, Lieve
dc.contributor.imecauthorWeldeslassie, Ataklti
dc.contributor.imecauthorWiaux, Vincent
dc.contributor.imecauthorPellens, Nick
dc.contributor.orcidimecVan Look, Lieve::0009-0000-6198-024X
dc.contributor.orcidimecWiaux, Vincent::0000-0002-8923-5708
dc.contributor.orcidimecPellens, Nick::0000-0001-5527-5130
dc.date.accessioned2024-04-16T08:58:54Z
dc.date.available2024-01-13T17:47:51Z
dc.date.available2024-04-16T08:58:54Z
dc.date.issued2023
dc.identifier.doi10.1117/12.2687703
dc.identifier.eisbn978-1-5106-6749-5
dc.identifier.isbn978-1-5106-6748-8
dc.identifier.issn0277-786X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/43409
dc.publisherSPIE-INT SOC OPTICAL ENGINEERING
dc.source.beginpageArt. 1275002
dc.source.conferenceInternational Conference on Extreme Ultraviolet Lithography
dc.source.conferencedateOCT 02-05, 2023
dc.source.conferencelocationMonterey
dc.source.journalProceedings of SPIE
dc.source.numberofpages14
dc.source.volume12750
dc.title

Stitching for High NA: zooming in on CDU budget

dc.typeProceedings paper
dspace.entity.typePublication
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