Stitching for High NA: zooming in on CDU budget

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Author(s)

Davydova, Natalia

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van Look, Lieve

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Weldeslassie, Ataklti

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Huddleston, Laura

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Timmermans, Frank

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Wittebrood, Friso

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van Setten, Eelco

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Journal

Proceedings of SPIE

Metrics

851 since deposited on 2024-01-13

Acq. date: 2025-10-23