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Silicide engineering: influence of alloying elements on CoSi2 nucleation
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Authors
Detavernier, C.
;
Van Meirhaeghe, R. L.
;
Maex, Karen
;
Cardon, F.
Conference
MRS Spring Meeting Symposium: Gate stack and silicide issues in silicon processing; 2000;
Title
Silicide engineering: influence of alloying elements on CoSi2 nucleation
Publication type
Oral presentation
Embargo date
9999-12-31
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