Integration of the 3MS low-k CVD material in a 0.18 μm Cu single damascene process

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Authors
Gao, Teng; Gray, William; Van Hove, Marleen; Struyf, Herbert; Meynen, Herman; Vanhaelemeersch, Serge; Maex, Karen
Conference
Advanced Metallization Conference 1999 - AMC 1999
Title
Integration of the 3MS low-k CVD material in a 0.18 μm Cu single damascene process
Publication type
Proceedings paper
Embargo date
9999-12-31
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