dc.contributor.author | Filippidou, Konstantina | |
dc.contributor.author | Bezard, Philippe | |
dc.contributor.author | Liu, I-Yun | |
dc.contributor.author | Rolin, Cedric | |
dc.contributor.author | Lazzarino, Frederic | |
dc.contributor.author | Ragnarsson, Lars-Ake | |
dc.date.accessioned | 2024-08-20T07:57:49Z | |
dc.date.available | 2024-06-06T18:30:25Z | |
dc.date.available | 2024-08-20T07:57:49Z | |
dc.date.issued | 2024 | |
dc.identifier.isbn | 978-1-5106-7222-2 | |
dc.identifier.issn | 0277-786X | |
dc.identifier.other | WOS:001223585400019 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/43991.2 | |
dc.source | WOS | |
dc.title | Where to apply sustainability optimizations in process flows? | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Filippidou, Konstantina | |
dc.contributor.imecauthor | Bezard, Philippe | |
dc.contributor.imecauthor | Liu, I-Yun | |
dc.contributor.imecauthor | Rolin, Cedric | |
dc.contributor.imecauthor | Lazzarino, Frederic | |
dc.contributor.imecauthor | Ragnarsson, Lars-Ake | |
dc.contributor.orcidimec | Filippidou, Konstantina::0009-0005-6098-4085 | |
dc.contributor.orcidimec | Bezard, Philippe::0000-0003-2499-0240 | |
dc.contributor.orcidimec | Liu, I-Yun::0009-0009-4281-9245 | |
dc.contributor.orcidimec | Rolin, Cedric::0000-0001-5542-8504 | |
dc.contributor.orcidimec | Lazzarino, Frederic::0000-0001-7961-9727 | |
dc.contributor.orcidimec | Ragnarsson, Lars-Ake::0000-0003-1057-8140 | |
dc.date.embargo | 2024-04-09 | |
dc.identifier.doi | 10.1117/12.3012753 | |
dc.identifier.eisbn | 978-1-5106-7223-9 | |
dc.source.numberofpages | 10 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 129580L | |
dc.source.conference | Conference on Advanced Etch Technology and Process Integration for Nanopatterning XIII | |
dc.source.conferencedate | FEB 26-29, 2024 | |
dc.source.conferencelocation | San Jose | |
dc.source.journal | Proceedings of SPIE | |
dc.source.volume | 12958 | |
imec.availability | Published - open access | |