EISBN
978-1-5106-7223-9
ISBN
978-1-5106-7222-2
ISSN
0277-786X
Conference
Conference on Advanced Etch Technology and Process Integration for Nanopatterning XIII
Journal
Proceedings of SPIE
Volume
12958
Title
Where to apply sustainability optimizations in process flows?
Publication type
Proceedings paper
Embargo date
2024-04-09