Publication:

Patterning spacer source drain cavities in CFET devices

Date

2024

Proceedings Paper

https://doi.org/10.1117/12.3013077

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Author(s)

Choudhury, Subhobroto

;

Mannaert, Geert

;

Petersen Barbosa Lima, Lucas

;

Demuynck, Steven

;

;

Lazzarino, Frederic

Journal

Proceedings of SPIE

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318 since deposited on 2024-06-06

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Acq. date: 2026-09-18