Publication:

Studies on resolution with ZEP530A for EUV mask

Date

2024
Proceedings Paper
https://doi.org/10.1117/12.3010109
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Author(s)

Shirotori, Akihide
;
Tsutsumi, Takashi
;
Yeh, Sin Fu  
;
Kuroyanagi, Kenji

Journal

Proceedings of SPIE

Abstract

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627 since deposited on 2024-06-06
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648 since deposited on 2024-06-06
Acq. date: 2026-09-19

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