Publication:

Advanced EUV patterning of 2D TMDs for CMOS integration

Date

2024
Proceedings Paper
https://doi.org/10.1117/12.3011818
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Author(s)

Faramarzi, Vina
;
de Poortere, Etienne
;
Venugopalan, Syam Parayil
;
Woltgens, Pieter
;
Woo, Youngtag
;
van de Kerkhof, Mark
;
Kumar, Pawan  
;
Medina Silva, Henry  
;
Morin, Pierre  
;
Asselberghs, Inge  
;
Dorow, Chelsey
;
O'Brien, Kevin
;
Maxey, Kirby
;
Avci, Uygar

Journal

Proceedings of SPIE

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396 since deposited on 2024-06-06
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698 since deposited on 2024-06-06
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