Authors
Gray, William;
Loboda, M.;
Struyf, Herbert;
Van Hove, Marleen;
Donaton, R. A.;
Sleeckx, Erik;
Stucchi, Michele;
Gao, Teng;
Boullart, Werner;
Coenegrachts, Bart;
Maenhoudt, Mireille;
Vanhaelemeersch, Serge;
Meynen, Herman;
Maex, Karen
Conference
MRS Spring Meeting 2000. Symposium D: Materials, Technology, and Reliability for Advanced Interconnects and Low-k Dielectrics; 2
Title
Process optimization and integration of trimethylsilane deposited a-SiC:H and SiOC:H dielectric thin films for damascene processing
Publication type
Oral presentation
