dc.contributor.author | Kükner, Halil | |
dc.contributor.author | Mirabelli, Gioele | |
dc.contributor.author | Yang, Sheng | |
dc.contributor.author | Zhou, Yun | |
dc.contributor.author | Makarov, Alexander | |
dc.contributor.author | Xiang, Yang | |
dc.contributor.author | Boemmels, Juergen | |
dc.contributor.author | Veloso, Anabela | |
dc.contributor.author | Zografos, Odysseas | |
dc.contributor.author | Weckx, Pieter | |
dc.contributor.author | Ryckaert, Julien | |
dc.contributor.author | Hellings, Geert | |
dc.date.accessioned | 2024-08-19T15:13:47Z | |
dc.date.available | 2024-06-15T17:25:02Z | |
dc.date.available | 2024-08-19T15:13:47Z | |
dc.date.issued | 2024 | |
dc.identifier.isbn | 978-1-5106-7214-7 | |
dc.identifier.issn | 0277-786X | |
dc.identifier.other | WOS:001224292100006 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/44031.2 | |
dc.source | WOS | |
dc.title | High-Density Standard Cell Libraries with Backside Power Options in A14 Nanosheet Node | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Mirabelli, Gioele | |
dc.contributor.imecauthor | Yang, Sheng | |
dc.contributor.imecauthor | Zhou, Yun | |
dc.contributor.imecauthor | Makarov, Alexander | |
dc.contributor.imecauthor | Xiang, Yang | |
dc.contributor.imecauthor | Boemmels, Juergen | |
dc.contributor.imecauthor | Veloso, Anabela | |
dc.contributor.imecauthor | Zografos, Odysseas | |
dc.contributor.imecauthor | Weckx, Pieter | |
dc.contributor.imecauthor | Ryckaert, Julien | |
dc.contributor.imecauthor | Hellings, Geert | |
dc.contributor.imecauthor | Kükner, Halil | |
dc.contributor.orcidimec | Mirabelli, Gioele::0000-0001-7060-4836 | |
dc.contributor.orcidimec | Yang, Sheng::0000-0002-0658-5316 | |
dc.contributor.orcidimec | Zhou, Yun::0000-0001-5879-6142 | |
dc.contributor.orcidimec | Makarov, Alexander::0000-0002-9927-6511 | |
dc.contributor.orcidimec | Xiang, Yang::0000-0003-0091-6935 | |
dc.contributor.orcidimec | Boemmels, Juergen::0000-0002-8761-5213 | |
dc.contributor.orcidimec | Zografos, Odysseas::0000-0002-9998-8009 | |
dc.contributor.orcidimec | Hellings, Geert::0000-0002-5376-2119 | |
dc.contributor.orcidimec | Kükner, Halil::0000-0002-6844-309X | |
dc.date.embargo | 2024-04-10 | |
dc.identifier.doi | 10.1117/12.3010866 | |
dc.identifier.eisbn | 978-1-5106-7215-4 | |
dc.source.numberofpages | 7 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 1295409 | |
dc.source.conference | Conference on DTCO and Computational Patterning III | |
dc.source.conferencedate | FEB 26-29, 2024 | |
dc.source.conferencelocation | San Jose | |
dc.source.journal | Proceedings of SPIE | |
dc.source.volume | 12954 | |
imec.availability | Published - open access | |