High-Density Standard Cell Libraries with Backside Power Options in A14 Nanosheet Node

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Authors
Kükner, Halil; Mirabelli, Gioele; Yang, Sheng; Zhou, Yun; Makarov, Alexander; Xiang, Yang; Boemmels, Juergen; Veloso, Anabela; Zografos, Odysseas; Weckx, Pieter; Ryckaert, Julien; Hellings, Geert
DOI
10.1117/12.3010866
EISBN
978-1-5106-7215-4
ISBN
978-1-5106-7214-7
ISSN
0277-786X
Conference
Conference on DTCO and Computational Patterning III
Journal
Proceedings of SPIE
Volume
12954
Title
High-Density Standard Cell Libraries with Backside Power Options in A14 Nanosheet Node
Publication type
Proceedings paper
Embargo date
2024-04-10
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220.500.12860/44031.2*2024-08-19T15:11:12Zvalidation by library/open access desk
120.500.12860/440312024-06-15T17:25:02Z

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