Publication:

Study of EUV stochastic defect on wafer yield

Date

2024

Proceedings Paper

https://doi.org/10.1117/12.3010858

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Files

Published version 1.34 MB

Author(s)

;

Chang, Chieh-Miao

;

;

;

Trivkovic, Darko

;

Kim, Ryan Ryoung han

Journal

Proceedings of SPIE

Statistics

951 since deposited on 2024-06-15

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Acq. date: 2026-02-27

682 since deposited on 2024-06-15

Acq. date: 2026-02-27