Actinic photoemission spectroscopy of litho materials using a table-top ultrafast EUV source

Singh, Dhirendra; Dorney, Kevin; Holzmeier, Fabian; Witting Larsen, Esben; Galleni, Laura; Mokhtarzadeh, Charles; van Setten, Michiel; Conard, Thierry; Petersen, John; van der Heide, Paul

doi:10.1117/12.3010751

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Actinic photoemission spectroscopy of litho materials using a table-top ultrafast EUV source

Date

2024

Proceedings Paper

https://doi.org/10.1117/12.3010751

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Singh, Dhirendra

;

Dorney, Kevin

;

Holzmeier, Fabian

;

Witting Larsen, Esben

;

Galleni, Laura

;

Mokhtarzadeh, Charles

;

;

;

;

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Proceedings of SPIE

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Acq. date: 2026-10-08

745 since deposited on 2024-06-15

Acq. date: 2026-10-08

Actinic photoemission spectroscopy of litho materials using a table-top ultrafast EUV source

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