Publication:

Actinic photoemission spectroscopy of litho materials using a table-top ultrafast EUV source

Date

2024
Proceedings Paper
https://doi.org/10.1117/12.3010751
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Author(s)

Singh, Dhirendra  
;
Dorney, Kevin  
;
Holzmeier, Fabian  
;
Witting Larsen, Esben  
;
Galleni, Laura  
;
Mokhtarzadeh, Charles
;
van Setten, Michiel  
;
Conard, Thierry  
;
Petersen, John  
;
van der Heide, Paul  

Journal

Proceedings of SPIE

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425 since deposited on 2024-06-15
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742 since deposited on 2024-06-15
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Acq. date: 2026-04-26

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