Publication:

Towards Improved Semiconductor Defect Inspection for high-NA EUVL based on SEMI-SuperYOLO-NAS

Date

2024
Proceedings Paper
https://doi.org/10.1117/12.3010940
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Published version 16.91 MB

Author(s)

Chen, Ying-Lin  
;
Deforce, Jacob  
;
De Ridder, Vic  
;
Dey, Bappaditya  
;
Blanco, Victor  
;
Halder, Sandip  
;
Leray, Philippe  

Journal

Proceedings of SPIE

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170 since deposited on 2024-06-15
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675 since deposited on 2024-06-15
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Acq. date: 2026-08-09

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