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Low Landing Energy as an Enabler for Optimal Contour Based OPC Modeling in the EUV Era

dc.contributor.authorAlkoken, Ran
dc.contributor.authorBaram, Mor
dc.contributor.authorOron, Gadi
dc.contributor.authorSchuch, Nivea
dc.contributor.authorRobert, Frederic
dc.contributor.authorFigueiro, Thiago
dc.contributor.authorBrand, Omri
dc.contributor.authorGeta, Matan
dc.contributor.authorSaha, Kasturi
dc.contributor.authorMiller, Elias
dc.contributor.authorZavhon, Tal
dc.contributor.authorTiwari, Dipayan
dc.contributor.authorSingh, Deepakkumar
dc.contributor.authorSarkar, Sujan Kumar
dc.contributor.authorRincon Delgadillo, Paulina
dc.contributor.authorLorusso, Gian
dc.contributor.authorBeral, Christophe
dc.contributor.authorWei, Chih-I
dc.contributor.authorCurvacho, Gabriel
dc.contributor.authorKim, Young Chang
dc.contributor.authorFenger, Germain
dc.date.accessioned2024-08-26T08:42:39Z
dc.date.available2024-06-15T17:25:53Z
dc.date.available2024-08-26T08:42:39Z
dc.date.issued2024
dc.identifier.isbn978-1-5106-7216-1
dc.identifier.issn0277-786X
dc.identifier.otherWOS:001224296200031
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/44048.2
dc.sourceWOS
dc.titleLow Landing Energy as an Enabler for Optimal Contour Based OPC Modeling in the EUV Era
dc.typeProceedings paper
dc.contributor.imecauthorSarkar, Sujan Kumar
dc.contributor.imecauthorLorusso, Gian
dc.contributor.imecauthorBeral, Christophe
dc.contributor.imecauthorRincon Delgadillo, Paulina
dc.contributor.orcidimecSarkar, Sujan Kumar::0000-0002-8471-6297
dc.contributor.orcidimecLorusso, Gian::0000-0003-3498-5082
dc.contributor.orcidimecBeral, Christophe::0000-0003-1356-9186
dc.date.embargo2024-04-09
dc.identifier.doi10.1117/12.3010898
dc.identifier.eisbn978-1-5106-7217-8
dc.source.numberofpages14
dc.source.peerreviewyes
dc.source.beginpageArt. 1295516
dc.source.conferenceConference on Metrology, Inspection, and Process Control XXXVIII
dc.source.conferencedateFEB 26-29, 2024
dc.source.conferencelocationSan Jose
dc.source.journalProceedings of SPIE
dc.source.volume12955
imec.availabilityPublished - open access


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220.500.12860/44048.2*2024-08-26T08:35:56Zvalidation by library/open access desk
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