Publication:

Defect inspection methodology for Contact Holes

Date

2024

Proceedings Paper

https://doi.org/10.1117/12.3015844

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Author(s)

Van Den Heuvel, Dieter

;

Beral, Christophe

;

Chowrira Poovanna Bhavishya

;

Foubert, Philippe

;

De Simone, Danilo

;

;

Beggiato, Matteo

;

Das, Shubhankar

;

Charley, Anne-Laure

;

;

;

;

;

Journal

Proceedings of SPIE

Metrics

492 since deposited on 2024-06-15

Acq. date: 2026-01-11