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Study of Endurance Performance of SiO2 Interfacial Layer Scaling Through O Scavenging in Si Channel n-FeFET With Si:HfO2 Ferroelectric Layer

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125 since deposited on 2024-06-24
Acq. date: 2026-01-09

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125 since deposited on 2024-06-24
Acq. date: 2026-01-09

Citations