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Pure-Metal Replacement Gate for Reliable 30 nm Pitch Scaled 3D NAND Flash
Publication:
Pure-Metal Replacement Gate for Reliable 30 nm Pitch Scaled 3D NAND Flash
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Date
2024
Proceedings Paper
https://doi.org/10.1109/IMW59701.2024.10536954
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Rachidi, Sana
;
Ramesh, Siva
;
Tierno, Davide
;
Donadio, Gabriele Luca
;
Pacco, Antoine
;
Maes, J. W.
;
Jeong, Yongbin
;
Arreghini, Antonio
;
Van den Bosch, Geert
;
Rosmeulen, Maarten
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461
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Acq. date: 2026-01-12
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Metrics
Views
461
since deposited on 2024-07-12
2
last month
Acq. date: 2026-01-12
Citations