Publication:

Pure-Metal Replacement Gate for Reliable 30 nm Pitch Scaled 3D NAND Flash

Date

2024
Proceedings Paper
https://doi.org/10.1109/imw59701.2024.10536954
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Author(s)

Rachidi, Sana  
;
Ramesh, Siva  
;
Tierno, Davide  
;
Donadio, Gabriele Luca  
;
Pacco, Antoine  
;
Maes, J. W.
;
Jeong, Yongbin  
;
Arreghini, Antonio  
;
Van den Bosch, Geert  
;
Rosmeulen, Maarten  

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478 since deposited on 2024-07-12
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478 since deposited on 2024-07-12
2last month
Acq. date: 2026-09-16

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