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Integrating diamond pyramids into metal cantilevers and using them as electrical AFM probes

dc.contributor.authorHantschel, Thomas
dc.contributor.authorSlesazeck, Stefan
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-14T13:02:52Z
dc.date.available2021-10-14T13:02:52Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4418
dc.sourceIIOimport
dc.titleIntegrating diamond pyramids into metal cantilevers and using them as electrical AFM probes
dc.typeOral presentation
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.source.peerreviewno
dc.source.conferenceMicro- and Nano-engineering Conference; September 2000; Jena, Germany.
dc.source.conferencelocation
imec.availabilityPublished - imec


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