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EFTEM analysis of the interaction of CO with a fluorinated organic dielectric

dc.contributor.authorHens, S.
dc.contributor.authorVan Landuyt, J.
dc.contributor.authorBender, Hugo
dc.contributor.authorLanckmans, Filip
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-14T13:03:23Z
dc.date.available2021-10-14T13:03:23Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4423
dc.sourceIIOimport
dc.titleEFTEM analysis of the interaction of CO with a fluorinated organic dielectric
dc.typeProceedings paper
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorMaex, Karen
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage1325
dc.source.endpage1326
dc.source.conferenceProceedings EUREM 12
dc.source.conferencedate9/07/2000
dc.source.conferencelocationBrno Czech Republic
imec.availabilityPublished - open access


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