Authors

Heyvaert, Ilse; Van Hove, Marleen; Witvrouw, Ann; Maex, Karen; Saerens, Annelies; Roussel, Philippe; Bender, Hugo

Issue

1_4

Journal

Microelectronic Engineering

Volume

50

Title

Effect of oxide and W-CMP on the material properties and electromigration behaviour of layered aluminum metallisations

Publication type

Journal article