Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Conference contributions
Side and Corner Region Non-Uniformities in Grown SiO2 and Their Implications on Current, Capacitance and Breakdown Characteristics
Publication:
Side and Corner Region Non-Uniformities in Grown SiO2 and Their Implications on Current, Capacitance and Breakdown Characteristics
Copy permalink
Date
2024
Proceedings Paper
https://doi.org/10.1109/IRPS48228.2024.10529495
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Bastos, Joao
;
O'Sullivan, Barry
;
Higashi, Yusuke
;
Vaisman Chasin, Adrian
;
Franco, Jacopo
;
Arimura, Hiroaki
;
Ganguly, Jishnu
;
Capogreco, Elena
;
Spessot, Alessio
;
Horiguchi, Naoto
Journal
Abstract
Description
Metrics
Views
424
since deposited on 2024-08-16
Acq. date: 2026-01-11
Citations
Metrics
Views
424
since deposited on 2024-08-16
Acq. date: 2026-01-11
Citations