Publication:

BEOL tip-to-tip dielectric reliability characterization using a design-representative test structure

Date

2024

Proceedings Paper

https://doi.org/10.1109/IRPS48228.2024.10529311

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Author(s)

;

Lesniewska, Alicja

;

;

Roussel, Philippe

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;

Vega Gonzalez, Victor

;

De Wolf, Ingrid

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Journal

N/A

Statistics

456 since deposited on 2024-08-16

Acq. date: 2026-02-25