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Conference contributions
BEOL tip-to-tip dielectric reliability characterization using a design-representative test structure
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BEOL tip-to-tip dielectric reliability characterization using a design-representative test structure
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Date
2024
Proceedings Paper
https://doi.org/10.1109/IRPS48228.2024.10529311
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Fang, Yu
;
Lesniewska, Alicja
;
Ciofi, Ivan
;
Roussel, Philippe
;
Wu, Chen
;
Vega Gonzalez, Victor
;
De Wolf, Ingrid
;
Croes, Kristof
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N/A
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456
since deposited on 2024-08-16
Acq. date: 2025-12-16
Citations
Metrics
Views
456
since deposited on 2024-08-16
Acq. date: 2025-12-16
Citations