Trap-assisted tunneling in high permittivity gate dielectric stacks

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Authors

Houssa, Michel; Tuominen, Marko; Naili, Mohamed; Afanas'ev, V.; Stesmans, Andre; Haukka, S.; Heyns, Marc

Issue

12

Journal

J. Appl. Physics

Volume

87

Title

Trap-assisted tunneling in high permittivity gate dielectric stacks

Publication type

Journal article

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