Publication:

Towards Improved Nanosheet-Based Complementary Field Effect Transistor (CFET) Performance Down to 42nm Contacted Gate Pitch

Date

2024

Proceedings Paper

https://doi.org/10.1109/EDTM58488.2024.10512269

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Author(s)

Chiarella, Thomas

;

Matagne, Philippe

;

;

Hosseini, Maryam

;

;

;

Arimura, Hiroaki

;

;

Richard, Olivier

;

Drijbooms, Chris

;

Caluwaerts, Rudy

;

Horiguchi, Naoto

;

Statistics

403 since deposited on 2024-09-14

Acq. date: 2026-06-23