Formation of (Nd,Y)-silicides by sequential channeled implantation of Y and Nd ions

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Authors

Jin, Sing; Bender, Hugo; Wu, Ming Fang; Vantomme, Andre; Langouche, G.

Issue

3

Journal

Nuclear Instruments and Methods B

Volume

B160

Title

Formation of (Nd,Y)-silicides by sequential channeled implantation of Y and Nd ions

Publication type

Journal article

Embargo date

9999-12-31

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