Publication:
Plasma Etch of IGZO Thin Film and IGZO/SiO2 Interface Diffusion in Inductively Coupled CH4/Ar Plasmas
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333 since deposited on 2024-10-30
2last month
Acq. date: 2026-01-07
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Views
333 since deposited on 2024-10-30
2last month
Acq. date: 2026-01-07
Citations