Publication:
Plasma Etch of IGZO Thin Film and IGZO/SiO2 Interface Diffusion in Inductively Coupled CH4/Ar Plasmas
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340 since deposited on 2024-10-30
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Acq. date: 2026-04-05
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Statistics
Views
340 since deposited on 2024-10-30
2last month
1last week
Acq. date: 2026-04-05
Citations