Publication:

Pop the bubbles and let the current flow: mechanochemistry of micron and nano-sized openings in dielectric layers

Date

2024
Journal article
https://doi.org/10.1038/s41598-024-78919-w
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Published version 2.55 MB

Author(s)

Birant, Gizem  
;
Rossi, Christian
;
Czech, Jan
;
Marchal, Wouter
;
Brammertz, Guy  
;
Aernouts, Tom  
;
Colombara, Diego
;
de Wild, Jessica  
;
Vermang, Bart  

Journal

SCIENTIFIC REPORTS

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220 since deposited on 2024-11-24
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281 since deposited on 2024-11-24
Acq. date: 2026-05-18

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