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Assessment of radiation induced lattice damage in shallow trench isolation diodes irradiated by neutrons

dc.contributor.authorKobayashi, K.
dc.contributor.authorOhyama, Hidenori
dc.contributor.authorHayama, Kiyoteru
dc.contributor.authorTakami, Y.
dc.contributor.authorSimoen, Eddy
dc.contributor.authorPoyai, Amporn
dc.contributor.authorClaeys, C.
dc.date.accessioned2021-10-14T13:10:38Z
dc.date.available2021-10-14T13:10:38Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4487
dc.sourceIIOimport
dc.titleAssessment of radiation induced lattice damage in shallow trench isolation diodes irradiated by neutrons
dc.typeOral presentation
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.source.peerreviewno
dc.source.conferenceBIAMS - 6th International Workshop on Beam Injection Assessment of Microstructures in Semiconductors; 12-16 November 2000; Fukuo
dc.source.conferencelocation
imec.availabilityPublished - imec


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