Publication:

Experimentally Validated Thermal Modeling Prediction for BEOL and BSPDN Stacks

Date

2024
Proceedings Paper
https://doi.org/10.1109/ECTC51529.2024.00084
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Author(s)

Chang, Xinyue  
;
Oprins, Herman  
;
Vermeersch, Bjorn  
;
Cherman, Vladimir  
;
Lofrano, Melina  
;
Park, Seongho  
;
Tokei, Zsolt  
;
De Wolf, Ingrid  

Journal

N/A

Abstract

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275 since deposited on 2024-12-07
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Acq. date: 2026-05-19

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275 since deposited on 2024-12-07
2last month
Acq. date: 2026-05-19

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