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Direct Die-to-Wafer Hybrid Bonding Using Plasma Diced Dies and Bond Pad Pitch Scaling Down to 2 μm
Publication:
Direct Die-to-Wafer Hybrid Bonding Using Plasma Diced Dies and Bond Pad Pitch Scaling Down to 2 μm
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Date
2024
Proceedings Paper
https://doi.org/10.1109/ECTC51529.2024.00015
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Lin, Ye
;
Bex, Pieter
;
Kennes, Koen
;
Derakhshandeh, Jaber
;
Dhakras, Prathamesh
;
Suhard, Samuel
;
Gerets, Carine
;
Dewilde, Sven
;
Georgieva, Violeta
;
Jourdain, Anne
;
Beyer, Gerald
;
Beyne, Eric
Journal
N/A
Abstract
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308
since deposited on 2024-12-07
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1
last week
Acq. date: 2025-12-16
Citations
Metrics
Views
308
since deposited on 2024-12-07
7
last month
1
last week
Acq. date: 2025-12-16
Citations