Overview of Ruthenium Thin Films Annealed by Microsecond Scanning UV Pulsed Laser: Structural, Electrical, and Failure Modes Analysis

Daubriac, Richard; Cancellara, Leonardo; Chehadi, Zeinab; Lu, Lu; Thuries, Louis; Khaled, Mohamed Ali; Roze, Fabien; Jourdan, Nicolas; Tokei, Zsolt; Descamps-Mandine, Armel; Hungria, Teresa; Fazzini, Pier-Francesco; Tabata, Toshiyuki; Huet, Karim

doi:10.1002/adem.202402656

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Overview of Ruthenium Thin Films Annealed by Microsecond Scanning UV Pulsed Laser: Structural, Electrical, and Failure Modes Analysis

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2025-JAN 7

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https://doi.org/10.1002/adem.202402656

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Descamps-Mandine, Armel

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Hungria, Teresa

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Fazzini, Pier-Francesco

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Tabata, Toshiyuki

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Huet, Karim

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ADVANCED ENGINEERING MATERIALS

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266 since deposited on 2025-01-14

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Acq. date: 2026-01-10

Overview of Ruthenium Thin Films Annealed by Microsecond Scanning UV Pulsed Laser: Structural, Electrical, and Failure Modes Analysis

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