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Observation of flexoelectric effect in PECVD silicon nitride
Publication:
Observation of flexoelectric effect in PECVD silicon nitride
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Date
2025-JAN 6
Journal article
https://doi.org/10.1063/5.0244972
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Nguyen, B. H.
;
Wu, C.
;
Czarnecki, P.
;
Rochus, V.
Journal
APPLIED PHYSICS LETTERS
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267
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Acq. date: 2026-01-11
Citations
Metrics
Views
267
since deposited on 2025-01-14
3
last month
1
last week
Acq. date: 2026-01-11
Citations