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A modified capacitance / voltage technique to characterize copper drift diffusion in organic low-K dielectrics
Publication:
A modified capacitance / voltage technique to characterize copper drift diffusion in organic low-K dielectrics
Date
2000
Proceedings Paper
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Lanckmans, Filip
;
Geenen, Luc
;
Vandervorst, Wilfried
;
Maex, Karen
Journal
Abstract
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2003
since deposited on 2021-10-14
2
last month
Acq. date: 2025-12-08
Citations
Metrics
Views
2003
since deposited on 2021-10-14
2
last month
Acq. date: 2025-12-08
Citations